Huahao Sealing · Carbon Graphite Components
Huahao Sealing provides ultra-high-purity carbon graphite seal rings and bearings for semiconductor dry vacuum pumps, mechanical vacuum pumps and plasma etch chamber rotary seals. Zero metal-ion leaching, zero grease contamination, SEMI-compliant, rated for 10⁻⁹ Torr ultra-high vacuum and corrosive process gases (CF₄, SF₆).
Dry vacuum pumps operate at 10⁻⁹ Torr ultra-high vacuum; seal outgassing contaminates wafer processes
Plasma etch chambers use corrosive process gases CF₄, SF₆, ClF₃ that chemically attack seal materials
Wafer fabrication demands zero metal-ion contamination; copper and iron ion leaching from metallic bearings causes fatal defects
High-temperature bake-out degassing (150-200°C) coexists with high speeds (4000-6000 rpm); seals suffer thermal instability
Ultra-high-purity carbon graphite grades, ash content ≤0.002%, zero metal-ion leaching, meeting SEMI F57 standard
Resin-impregnated grades with zero outgassing and zero grease volatilization for ultra-high vacuum service
Carbon graphite chemical inertness withstands CF₄, SF₆ and other fluorine plasma chemical attack
Paired with SiC mating face of high thermal conductivity for heat dissipation in high-speed and bake-out service
| Vacuum Level | 10⁻⁹ Torr |
| Temperature | -20°C ~ 350°C |
| Speed | ≤ 6000 rpm |
| Media | CF₄, SF₆, ClF₃, N₂, Ar plasma |
| Ash Content | ≤ 0.002% |
| Standard | SEMI F57 |
No. Ultra-high-purity grades have ash content ≤0.002%, zero metal-ion leaching, meeting SEMI F57. Resin-impregnated grades have zero outgassing and zero grease volatilization for 10⁻⁹ Torr UHV service.
Carbon graphite is chemically inert and withstands CF₄, SF₆ and fluorine plasma attack. However, prolonged strong-oxidizer plasma may graphitize the surface; select high-density impregnated grades for durability.
BIA series high-purity carbon graphite seal ring with SiC mating face. SiC high thermal conductivity dissipates friction heat; graphite self-lubrication lowers friction coefficient for 6000 rpm service.
Resin-impregnated grades leave no volatile residue after bake-out, with stable performance. Anti-oxidation impregnated grades are rated 350-500°C; 200°C bake-out is well within limits with no impact.
